
|
1
|
Normal status (depressurized)
|
|
2
|
Diaphragm chamber
|
|
3
|
Spring
|
|
4
|
Rod
|
|
5
|
Shutter valve (open)
|
|
6
|
Vacuum applied
|
|
7
|
Vacuum applied
|
|
8
|
Rod pulled
|
|
9
|
Shutter valve (closed)
|